Semiconductor and Electronics Industry Solutions

Diablo Analytical has successfully implemented analytical measurement solutions in semiconductor factory facilities ("fabs") for problem solving, baseline data collection, and ongoing process analysis from our location near “Silicon Valley”.

Developing and implementing chemical measurement solutions for the semiconductor and electronics industries require special consideration due to the unique operating environment and materials. The semiconductor clean room environment is a demanding place to implement analytical measurement systems due to size, material, and "cleanliness" restrictions. However, with proper design, analytical systems can be configured for use in clean rooms on either a permanent or temporary basis.

Chemical Measurement Solutions

Gas Chromatography and Mass Spectrometry Systems

Diablo has implemented gas-phase measurement technologies like gas chromatography and mass spectrometry for a number of different semiconductor and electronics industry applications including:

Process Analysis

Process and gas system troubleshooting and analysis using "on-line" mass spectrometry (see the Agilent 5000A Real-Time Gas Analyzer).
Specification and validation of oxygen and moisture analyzers for semiconductor tool applications.

High-purity Gas Testing

Special high-purity GC-DID systems for trace contaminant determination in electronics gases.
Specially- configured GC-AED and GC-MS systems and methods for the trace analysis of hydride gases.

Disk-drive Testing

Methods to detect organic residuals in disk-drive components.
GC-AED methods for the determination or residual organo-metallics.
Methods to assist in failure analysis.

Semiconductor Materials Testing

GC-AED and GC-MS thermal-desorption methods for residual organics on silicon wafers.

Liquid Chromatography (LC) Systems

LC systems are more demanding to place into semiconductor factory areas due to the use of mobile-phase solvents. However, certain applications, typically related to plating processes, require liquid-phase analysis. Diablo has successfully developed, implemented, and supported LC systems in semiconductor clean room environments.

Automation and Software Solutions

Operations personnel have limited time and many process tools and their associated data/control systems to learn and operate. Therefore, automation and simplification are critical to the success of analytical measurement systems. The programmers at Diablo Analytical have been creating custom software applications to address these kinds of issues for more than a decade. A few example projects that we have completed are listed below.

Custom Process Tool Communication Applications

Traditional laboratory instruments like liquid chromatographs (LCs) and gas chromatographs (GCs), are still somewhat rare in semiconductor fabs. Consequently, there is typically no provision available to communicate results between the instrument data system and the processing tool. Diablo has developed software that allows the results from an Agilent GC or LC ChemStation analysis to be sent automatically to a processing tool like an auto doser.

Simplified Software Interfaces

Diablo has developed a number of simplified "front ends" for more complex data and process control systems. One example is our "Simplified User Interface software. This software provides one-button control of Agilent Technologies GC or LC ChemStations. We have developed custom versions of the SUI software to address specific semiconductor-industry customer requirements. Please contact Diablo Analytical for more information.

Gas System Monitor

When analyzing toxic or pyrophoric specialty gases using gas chromatography, it is critical that the gas sampling system be operating properly before performing an analysis. Diablo wrote a custom application that monitored several sampling system pressure and flow sensors, and would prevent the Agilent ChemStation from starting an analysis if the sampling system wasn't ready.

Quotation and Purchasing Information

Please contact Diablo Analytical to discuss your specific application requirements and to receive a project quotation.

Diablo Analytical, Inc.

1110 Burnett Ave, Suite C
P.O. Box 5889
Concord, CA 94524

Phone: (925) 609-1150
Fax: (925) 609-9360
E-Mail: info@diabloanalytical.com